主要參數:
項目(Property) | 檢驗標準(Specification) | 測量方法(Measurement) |
晶體結構(Crystallinity) | 單晶 (Mono-crystalline) | 位錯檢測儀 (Dislocation Tester) |
導電類型 (Donor type/Dopant) | P型 (P-type) | P/N型測試筆 (P/N Tester) |
氧含量(Oxygen Concentration) | ≤7.5×1017atoms/cm3 | 德國布魯布TENSOR II(BRUKER TENSOR II) |
碳含量(Carbon Concentration) | ≤5.0×1016atoms/cm3 | 德國布魯布TENSOR II(BRUKER TENSOR II) |
少子壽命 (Lifetime) | ≥50μS | Sinton BCT-400 |
平均電阻率(AVG Resistivity) | 0.85±0.03Ω·CM | Hennecke六代分選機(HENNECKS SORTER VI |